IRIS publication 160960628
Titanium as a micromechanical material
RIS format for Endnote and similar
TY - - Other - O'Mahony, C,Hill, M,Hughes, PJ,Lane, WA - 2002 - February - Titanium as a micromechanical material - Validated - 1 - () - MEMORY - The suitability of titanium for use in microelectromechanical applications, is investigated. A range of titanium microdevices, including free-standing fixed-fixed beams and cantilevers, has been successfully fabricated using a fully CMOS compatible, dry-release surface micromachining process. Finite-Clement simulations have been used to extract a semi-analytical model which describes the pull-in behaviour of fixed-fixed beams. while taking into account the effects of the non-ideal beam anchors. This method has been used to obtain an estimate of the Young's modulus and residual stress in the metal. Capacitance monitoring has shown that the beams remain flat after sacrificial layer release, and interferometry imaging has been used to investigate the stability of beam anchors during device actuation. Furthermore, titanium beams have remained stable under repeated actuation in initial cycle testing and may be suitable for use as a major component of microswitches. One such possible design is outlined. - 438 - 443 - PII S0960-1317(02)32537-3 DA - 2002/02 ER -
BIBTeX format for JabRef and similar
@misc{V160960628, = {Other}, = {O'Mahony, C and Hill, M and Hughes, PJ and Lane, WA }, = {2002}, = {February}, = {Titanium as a micromechanical material}, = {Validated}, = {1}, = {()}, = {MEMORY}, = {{The suitability of titanium for use in microelectromechanical applications, is investigated. A range of titanium microdevices, including free-standing fixed-fixed beams and cantilevers, has been successfully fabricated using a fully CMOS compatible, dry-release surface micromachining process. Finite-Clement simulations have been used to extract a semi-analytical model which describes the pull-in behaviour of fixed-fixed beams. while taking into account the effects of the non-ideal beam anchors. This method has been used to obtain an estimate of the Young's modulus and residual stress in the metal. Capacitance monitoring has shown that the beams remain flat after sacrificial layer release, and interferometry imaging has been used to investigate the stability of beam anchors during device actuation. Furthermore, titanium beams have remained stable under repeated actuation in initial cycle testing and may be suitable for use as a major component of microswitches. One such possible design is outlined.}}, pages = {438--443}, = {PII S0960-1317(02)32537-3}, source = {IRIS} }
Data as stored in IRIS
OTHER_PUB_TYPE | Other | ||
AUTHORS | O'Mahony, C,Hill, M,Hughes, PJ,Lane, WA | ||
YEAR | 2002 | ||
MONTH | February | ||
TITLE | Titanium as a micromechanical material | ||
RESEARCHER_ROLE | |||
STATUS | Validated | ||
PEER_REVIEW | 1 | ||
TIMES_CITED | () | ||
SEARCH_KEYWORD | MEMORY | ||
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ABSTRACT | The suitability of titanium for use in microelectromechanical applications, is investigated. A range of titanium microdevices, including free-standing fixed-fixed beams and cantilevers, has been successfully fabricated using a fully CMOS compatible, dry-release surface micromachining process. Finite-Clement simulations have been used to extract a semi-analytical model which describes the pull-in behaviour of fixed-fixed beams. while taking into account the effects of the non-ideal beam anchors. This method has been used to obtain an estimate of the Young's modulus and residual stress in the metal. Capacitance monitoring has shown that the beams remain flat after sacrificial layer release, and interferometry imaging has been used to investigate the stability of beam anchors during device actuation. Furthermore, titanium beams have remained stable under repeated actuation in initial cycle testing and may be suitable for use as a major component of microswitches. One such possible design is outlined. | ||
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START_PAGE | 438 | ||
END_PAGE | 443 | ||
DOI_LINK | PII S0960-1317(02)32537-3 | ||
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