IRIS publication 276842321
SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization
RIS format for Endnote and similar
TY - JOUR - MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A - 2003 - January - IEEE Transactions on Semiconductor Manufacturing - SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization - Published - () - 16 - 2 - 207 - 214 DA - 2003/01 ER -
BIBTeX format for JabRef and similar
@article{V276842321, = {MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A}, = {2003}, = {January}, = {IEEE Transactions on Semiconductor Manufacturing}, = {SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization}, = {Published}, = {()}, = {16}, = {2}, pages = {207--214}, source = {IRIS} }
Data as stored in IRIS
AUTHORS | MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A | ||
YEAR | 2003 | ||
MONTH | January | ||
JOURNAL_CODE | IEEE Transactions on Semiconductor Manufacturing | ||
TITLE | SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization | ||
STATUS | Published | ||
TIMES_CITED | () | ||
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VOLUME | 16 | ||
ISSUE | 2 | ||
START_PAGE | 207 | ||
END_PAGE | 214 | ||
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